SL 5400 Single Stage Springless Regulator

(5400)
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Technical Resources
  • Single stage
  • 10 µin. surface finish (7 and 5 µin. optional)
  • 316L SS VAR secondary remelt construction
  • Vacuum to 1000 psig (69 bar) inlet
  • UHP Semiconductor cleaned, assembled, tested and packaged
  • Cylinder and point of use applications
  • Knob LOTO
Specifications
  • Series: SL
  • Material: 316L SS VAR
  • Connection Type: UHP Face Seal
  • Connection Size Inch: 1/4, 3/8, 1/2
  • Inlet PSIG/BAR: 1000 PSIG/69 Bar
  • Outlet MAX PSIG/BAR: 100 PSIG/7 Bar
  • CV STD/OPT: 0.23
  • Flow SLPM STD/OPT: 200 SLPM
  • Hastelloy Internal: Optional
  • Tied Diaphragm: Standard