Gas Connection Assignment Table
| Gas | Symbol | Aka | UHP | DISS CGA |
| Acetylene | C2H2 | 510 | ||
| Ammonia | NH3 | 720 | 240, 660 or 705 | |
| Argon | Ar | 718 | 580* | |
| Arsenic Pentafluoride | 642 | - | ||
| Arsine | AsH3 | 632 | 350 | |
| Boron Trichloride | BCl3 | 634 | 660 | |
| Boron Trifluoride | BF3 | 642 | 330 | |
| Carbon Dioxide | CO2 | 716 | 320 | |
| Carbon Monoxide | CO | 724 | 350 | |
| Chlorine | Cl2 | 728 | 660 | |
| Diborane | B2H6 | 632 | 350 | |
| Dichlorosilane | SiH2Cl2 | DCS | 636 | 678* |
| Diethlyzinc | C4H10Zn | DEZ | 726 | 510* |
| Diethyltelluride | (C2H5)2Te | 726 | 350 | |
| Dimethylzinc | C2H6ZN | DMZ | 726 | - |
| Ethane | C2H6 | - | 350 | |
| Ethylene | C2H4 | - | 350 | |
| Disilane | Si2H6 | 632 | 350 | |
| Germane | GeH4 | 632 | 350 or 660 | |
| Trichlorofluoromethane | CCL3F | Halocarbon 11 | 716 | 660 |
| Chloropentafloroethane | C2CLF5 | Halocarbon 115 | 716 | 660 |
| Dichlorodifluoromethane | CCL2F2 | Halocarbon 12 | 716 | 660 |
| Chlorotrifluoromethane | CCLF3 | Halocarbon 13 | 716 | 660 |
| Tetrafluoromethane | CF4 | Halocarbon 14 | 716 | 320 or 580 |
| Chlorodifluoromethane | CHCiF2 | Halocarbon 22 | 716 | 660 |
| Trifluoromethane | CHF3 | Halocarbon 23 | 716 | 660 |
| Hexafluoroethane | C2F6 | Halocarbon 116 | 716 | 660 |
| Octofluoropropane | C2F8 | Halocarbon 218 | 716 | 660 |
| Octafluorocyclobutane | C4F8 | Halocarbon C318 | 716 | 660 |
| Helium | He | 718 | 580 | |
| Hydrogen | H2 | 724 | 350 | |
| Hydrogen Bromide | HBr | 634 | 330 | |
| Hydrogen Chloride | HCl | 634 | 330 | |
| Hydrogen Fluoride | HF | 638 | 660 or 670 | |
| Hydrogen Sulfide | H2S | 722 | 330 | |
| Methane | CH4 | - | 350 | |
| Krypton | Kr | 718 | 580 | |
| Neon | Ne | 718 | 580 | |
| Nitrogen | N2 | 718 | 580* | |
| Nitrogen Dioxide | NO2 | - | 330 | |
| Nitrogen Trifluoride | NF3 | 640 | 330 or 670 | |
| Nitric Oxide | NO | - | 660 | |
| Nitrous Oxide | N2O | 712 | 326 | |
| Oxygen | O2 | 714 | 540 | |
| Perfluoropropane | C3F8 | 716 | 660 | |
| Phosphine | PH3 | 632 | 350 or 660 | |
| Propane | C3H8 | 510 | 510 | |
| Propylane | C3H6 | 510 | 510 | |
| Phosphorus Pentafluoride | PF5 | 642 | 330 or 660 | |
| Silane | SiH4 | 632 | 350 | |
| Silicon Tetrachloride | SiCl4 | ST | 636 | - |
| Silicon Tetrafluoride | SiF4 | 642 | 330 | |
| Sulfur Dioxide | SO2 | - | 660 | |
| Sulphur Hexafluoride | SF6 | 716 | 590 | |
| Trichlorosilane | SiHCl3 | TCS | 636 | - |
| Trimethylaluminum | Al(CH3)3 | TMA | 726* | 510* |
| Tungsten Hexafluoride | WF6 | 638 | 670 | |
| Xenon | Xe | 718 | 580 |
* Consult CGA, DIN, JIS, ISO organization specifications for pressure limits. ** Information in this table was obtained from reliable sources.
It shall be used for reference only.
Actual gas assignments are subject to periodic change and the user must verify all information in this table at time of use.
Please reference Material Safety Data Sheet (MSDS) for your specific gas needs.
For verification, contact SilPac 408-492-0011 or contact us
