Entegris Gas Purifiers

  • MicroTorr Purifiers

Our Entegris purifiers use a variety of specialized media for ambient temperature purification; each one is specific to a particular gas (N2, Ar, Xe, N2O, etc.) or group of gases. Use of these specialized media allows for high flow capabilities in a compact design and provides long working life, even in continuous-use applications. SilPac works with OEMs to find the perfect gas purifiers for high purity gas delivery systems.

Our Entegris purifiers come as part of a panel system. We will help select the right purifier and panel combination for your exact specification needs.


Why Choose Entegris Purifiers?

Entegris GPU purifiers are the most complete and most reliable solution for point of use purification of high purity gases. By matching the ideal size/configuration with the right purification media, users can create the perfect MicroTorr® solution for their purification requirements.

The Right Point of Use Purifier for Your Application

SilPac stocks a variety of Entregris purifiers, making it easy to find the right model for your application. If you’re not sure which model you need, don’t hesitate to contact us. We’ll work with you to find a gas purifier that meets your unique performance requirements.

Features & Benefits of Entegris Purifiers

  • Process control and protection: Purity control below part-per-billion (ppb) levels. Low pressure drop through the purifier. CE certified to the Pressure Equipment Directive (PED) 
  • Performance: is known for innovative gas purification technology that provides low pressure drop and long working life.
  • Superior Quality: All models are manufactured from 316L stainless steel and are helium leak checked, pressure tested, and analytically tested to ppt levels.

See individual product listings for additional information and specifications.

* Flow rates stated without optional filters or valves

Contact SilPac for Point of Use Gas Purifiers & More

We are your #1 source for innovative, high performance gas handling solutions, from ambient inline purifiers to complete gas delivery systems. Request a quote or contact us for the MicroTorr® point of use purifier your application requires.