AP 1100 Single Stage Regulator

(1100)
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Technical Resources
  • Single stage
  • SS 316L VAR secondary remelt or super alloy construction
  • Surface finish 15 Ra max/10 Ra avg (10, 7 & 5 Ra max options)
  • Only one nonmetallic seal (PCTFE) in the process stream
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rate to 500 sccm
  • Vacuum to 300 psig (21 bar) inlet, 100 torr to 10 psig (.7 bar) outlet
  • Knob LOTO option
Specifications
  • Series: AP
  • Material: 316L SS VAR
  • Connection Type: UHP Face Seal
  • Connection Size Inch: 1/4, 3/8
  • Inlet PSIG/BAR: 300 PSIG/21 Bar
  • Outlet MAX PSIG/BAR: 100mm Hg to 10 psig
  • CV STD/OPT: 0.05
  • Flow SLPM STD/OPT: 1 SLPM
  • Hastelloy Internal: Optional
  • Absolute: Standard