SL 5200 Mini Regulator

(5200)
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Technical Resources
  • Single stage
  • Stainless steel 316L VAR secondary remelt construction
  • 1 sccm to 30 slpm flow capacity standard, 200 sccm to 130 slpm with HF option
  • Vacuum to 150 psig (10 bar) inlet
  • Point of use regulation at its finest
  • Surface mount (IGS) 1.5 inch C and W seal
  • Ultraclean technology backed by service and support
Specifications
  • Series: SL
  • Material: 316L SS VAR
  • Connection Type: UHP Face Seal, Surface Mount
  • Connection Size Inch: 1/4, 3/8
  • CV STD/OPT: 0.07/0.15
  • Inlet PSIG/BAR: 150 PSIG/10 Bar
  • Outlet MAX PSIG/BAR: 100 PSIG/7 Bar
  • Flow SLPM STD/OPT: 30/100 SLPM
  • Hastelloy Internal: Optional
  • Tied Diaphragm: Standard
  • Absolute: Optional