• gpus10M

GPUS10M8R Gas Purifier

Entegris’ GPU gas purifiers are designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. Model 10M-8R is designed for peak flow rates up to 1000 slpm.

 
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Specifications
  • Nominal Flow *: 260.0 SLPM
  • Max Flow *: 1,000 SLPM
  • Max PSI: 370 PSIG
Technical Resources