• gpus13M

GPUS13M12R Gas Purifier

Entegris’  GPU gas purifiers are designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. Model 13M-12R is designed for peak flow rates up to 2000 slpm.

 
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Specifications
  • Nominal Flow *: 320.0 SLPM
  • Max Flow *: 2,000 SLPM
  • Max PSI: 370 PSIG
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