• gpus35

GPUS35 Gas Purifier

Entegris’ GPU gas purifiers are designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. The model 35 is designed for peak flow rates up to 1 slpm.

 
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Specifications
  • Nominal Flow *: 0.5 SLPM
  • Max Flow *: 1 SLPM
  • Max PSI: 1,400 PSIG
Technical Resources