• gpus200

GPUS200 Gas Purifier

Entegris’ GPU series of gas purifiers were designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. The model 200 is designed for peak flow rates up to 20 slpm.

 
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Specifications
  • Nominal Flow *: 4.2 SLPM
  • Max Flow *: 20 SLPM
  • Max PSI: 800 PSIG
Technical Resources