• gpus17M

GPUS17M16R Gas Purifier

Entegris’ GPU series of gas purifiers are designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. Model 17M-16R is designed for peak flow rates up to 2500 slpm.
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Specifications
  • Nominal Flow *: 400.0 SLPM
  • Max Flow *: 2,500 SLPM
  • Max PSI: 370 PSIG
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