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  • AZ 15PA Pneumatically Actuated Pressure Regulator

AZ 15PA Pneumatically Actuated Pressure Regulator

(15PA)
  • Actuation control pressure isolated from process gas
  • SS 316L construction
  • 10 µin. surface finish (25 µin. optional)
  • Vacuum to 3500 psig (241 bar) inlet
  • 7 to 150 psig (0.5 to 10 bar) outlet
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • 100 psig outlet achieved with 80 psig control pressure or less
  • Actuation ‘fail safe’ normally closed (NC)
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Specifications
Inlet PSIG/BAR:3500 PSIG/241 Bar
Connection Type:UHP Face Seal
Material:316L SS
Outlet MAX PSIG/BAR:150 PSIG/10 Bar
Series:AZ
CV STD/OPT:0.09/0.15
Flow SLPM STD/OPT:30 SLPM
Hastelloy Internal:Optional
Tied Diaphragm:Standard
Connection Size Inch:1/4, 3/8
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