• gpus5000

GPUS5000 Gas Purifier

Entegris’ GPU gas purifiers are designed to improve purity consistency, lifetime and final purity. Leveraging its expertise in material science, Entegris has developed a new generation of purification products that deliver unsurpassed value and performance. The model 5000 is designed for peak flow rates up to 800 slpm.

 
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Specifications
  • Nominal Flow *: 125.0 SLPM
  • Max Flow *: 500 SLPM
  • Max PSI: 505 PSIG
Technical Resources