Specialized Point of Use Purifiers
MicroTorr® purifiers use a variety of specialized medias for ambient temperature purification, each one is specific to each gas. This media provides high flow capabilities and long lifetimes in a compact design. MicroTorr® purifiers are offered in more than twenty different sizes to accommodate flow rates from 500 sccm to 1,000 slpm while at the same time removing impurities to less than 1 ppb. This series of purifiers also offers a wide selection of valve and filter options.