AZ 1000 Single Stage Regulator

(1000)
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Technical Resources
  • SS 316L construction
  • 10 µin. surface finish (25 µin. optional)
  • Vacuum to 3500 psig (241 bar) inlet
  • 1 to 300 psig (0.07 to 21 bar) outlet
  • Cleaned, assembled and packaged for high purity semiconductor applications
  • Flow rates - Standard to 30 slpm - HF option to 120 slpm
  • Regulator of choice for point of use applications
Specifications
  • Series: AZ
  • Material: 316L SS
  • Connection Type: UHP Face Seal
  • Connection Size Inch: 1/4, 3/8
  • Inlet PSIG/BAR: 3500 PSIG/241 Bar
  • Outlet MAX PSIG/BAR: 150 PSIG/10 Bar
  • CV STD/OPT: 0.09/0.15
  • Flow SLPM STD/OPT: 30/100 SLPM
  • Hastelloy Internal: Optional