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  • SL-5200

5200 Single Stage Springless Pressure Regulator

(5200)
  • Single stage
  • Stainless steel 316L VAR secondary remelt construction
  • 1 sccm to 30 slpm flow capacity standard, 200 sccm to 130 slpm with HF option
  • Vacuum to 150 psig (10 bar) inlet
  • Point of use regulation at its finest
  • Surface mount (IGS) 1.5 inch C and W seal
  • Ultraclean technology backed by service and support
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Specifications
Series:SL
Material:316L SS VAR
Connection Type:UHP Face Seal, Surface Mount
Connection Size Inch:1/4, 3/8
Inlet PSIG/BAR:150 PSIG/10 Bar
Outlet MAX PSIG/BAR:100 PSIG/7 Bar
CV STD/OPT:0.07/0.15
Flow SLPM STD/OPT:30/100 SLPM
Hastelloy Internal:Optional
Absolute:Optional
Tied Diaphragm:Standard
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